【摘要】 采用射频磁控溅射方法制备出纳米二氧化钛 (TiO2 )薄膜 ,研究了不同退火温度对薄膜微观结构和超亲水性的影响。结果表明 :退火温度升高 ,晶粒长大 ,孔隙率减小 ;常温制备 30 0℃以下退火的TiO2 薄膜为无定形结构 ,亲水性差 ;4 0 0℃～ 6 5 0℃退火的薄膜为锐钛矿结构 ,表现出超亲水性 ;80 0℃退火薄膜为金红石结构 ,亲水性有所下降更多还原

【Abstract】 Microstructures and hydrophilicity of titanium dioxide nanofilms,deposited by RF magnetron sputtering and annealed at different temperatures,were studied with scanning electron spectroscopy (SEM),X ray diffraction (XRD) and water contact angle technique.The results show that as annealing temperature increases,the grain size grows but the porosity reduces.Annealed at 300 ℃,the amorphous TiO 2 film has a rather poor hydrophilicity.In contrast,annealed at a temperature ranging from 400 ℃ to 650 ℃,super hydrophilicity of the anatase phased TiO 2 film can be observed.And on increasing the annealing temperature to 800 ℃,the hydrophilicity of the rutile phased film deteriorates slightly.更多还原