【摘要】 简要介绍了光学滤光片的制造与使用状况,讨论了获得高质量的光学滤光片的条件,简单分析常用方法中光电极值法的固有缺陷,提出一种基于宽光谱扫描法的膜厚控制系统,重点介绍其监控原理、硬件系统及其控制流程,并对其性能进行分析和讨论。更多还原

【Abstract】 The status of manufacturing and application of optical filters were described in brief, discussing the conditions on how to obtain high quality filter film were discussed. And the inherent limitations of the method of photo-electricity limiting value in prevailing film monitoring methods were briefly analyzed. A film thickness monitoring system based on the method of wide band spectrum scanning was proposed, its principle, hardware system and controlling flow were introduced. Finally, the expectation of its application in the area of monitoring the narrow-bandwidth film was also discussed.更多还原