【摘要】 采用电弧离子镀技术、TA5钛合金靶沉积TiAlBN薄膜 ,研究了这种多元膜的显微硬度、高温氧化性能和组织结构 ,结果表明 :这种多元膜具有优于TiN膜的显微硬度 ;不同于TiN膜的显微组织 ,其最显著的特征是存在一些细小的钛滴 ;双靶工作状态下 ,这些钛滴与膜之间的融合效果较好 ,膜层表面孔隙较少 ;薄膜具有TiN的面心立方结构 ,与TiN膜相比 ,具有更加明显的择优取向趋势。更多还原

【Abstract】 TiAlBN films have been deposited by cathode arc ion-plating with TA5 titanium alloy target. The performance and microstructure have been studied. The results show that the microhardness of the multi-component films is higher than that of TiN films. The films have better high temperature oxidation performance than that of TiN films. The microstructure of the multi-component films is quite different from TiN films. The microstructure of the multi-component films is characteristic of some small titanium droplets. The titanium droplets are combined with the films substrate and there are a few pores in the films surface in the condition of double targets. It is found that the preferred orientation exists in the films.更多还原