【摘要】 概述了电光检测技术空间分辨率的发展。为适应集成电路工艺水平的提高,电光检测技术必须提高空间分辨率和电压灵敏度。介绍了近年来开展的提高空间分辨率到亚微米量级的研究,提出了未来空间分辨率进一步提高的设想。更多还原

【Abstract】 Progress in the research of spatial resolution of electro-optic measuring techniques is summarized.In order to follow the advancement of the IC process,the spatial resolution and voltage sensitivity of electro-optic measuring techniques should be improved.Recent researches on the improvement of the spatial resolution in sub-microns are described,and possible solutions to be adopted in the future for improvement of the spatial resolution are proposed.更多还原