【摘要】 建立了一在固定运动范围内具有高精度定位能力的精密定位平台,分析了平台参数的确定方法。并通过研究该平台的第一自然共振频率,给出了提高定位平台稳定性的频率要求。更多还原

【Abstract】 A precision positioning stage is designed in this paper,which can achieve high degree of accuracy in fixed movement range.The method of determining the stage parameter is analyzed, and the frequency requirement to improve the stability of the positioning stage is given by studying the first natural resonance frequency of the system.更多还原