【摘要】 以聚酰亚胺和聚二甲基硅氧烷两类材料为例 ,研究了聚合物微透镜阵列的制备工艺以及与CCD图像传感器芯片的单片集成工艺 ,阐述了光学聚合物用于单片集成应具有的材料性能 ,对热熔产生的光刻胶微透镜阵列进行反应离子刻蚀得到了这两种聚合物材料微透镜阵列更多还原

【Abstract】 Aiming at two kinds of polymer materials, polyimide and polydimethylsiloxane, this paper investigated the fabrication process of microlens array and monolithic integration with imaging sensors. The materials properties for monolithic integration application were discussed. These polymer microlens array were obtained by the use of reactive ion etching of reflowed photoresist microlens array.更多还原