【摘要】 针对离轴三镜系统光学元件各调整变量之间的关系,提出了一种求解失调量的方法。从分析调整变量之间的关系入手,采用求条件数的方法来判断变量之间的相关程度,去除相关的变量,从而确定出系统的待调整量。计算机模拟表明,只需进行一次迭代求解出的系统待调整量即可满足装调精度要求,调整后整个系统波像差的均方根值(RMS)与理想状态之差小于0.02λ。这种方法是用所确定的调整变量的变化补偿其它相关变量的失调,不仅结果准确、收敛速度快,而且需要调整的自由变量少,大大缩短了装调周期。更多还原

【Abstract】 A method to determine these variables and magnitudes is put forward according to the relationship among misalignment variables of an off-axis three-mirror system. The correlation among variables is obtained by calculating the condition number of the sensitivity matrix for optical systems. The alignment variables and magnitudes are gotten by eliminating correlative variables. The results simulated by a computer show that the alignment variables and magnitudes determined by only once iterative is feasible theoretically. The difference between the wavefront RSM errors before and after alignment is within 0.02λ. This method is realized by compensation among variables. It can meet the precision requirement and accelerate the convergence of misalignment variables. With variables deduced, the time of alignment is saved.更多还原