【摘要】 采用光学传输矩阵方法分析了厚度偏差对VCSEL的反射谱和反射相移产生的影响。结果表明,反射镜和VCSEL中各层厚度的偏大,将使反射镜的中心波长以及VCSEL的模式波长向长波方向移动,而反射镜和VCSEL中各层厚度的偏小,将使反射镜的中心波长以及VCSEL的模式波长向短波方向移动。将键合界面离有源区稍微远一些,有利于减小其厚度偏差对VCSEL的模式波长的影响。更多还原

【Abstract】 The effect of thickness deviation on the reflection spectra and phase shift of VCSELs has been analysed using optical transfer matrix method. The result shows that a positive thickness bias in DBR and VCSEL result in a shifting of the center wavelength of the DBR and the mode wavelength of the VCSEL toward long wavelength, while a negative thickness bias in DBR and VCSEL lead to a blue shifting of both the center wavelength of the DBR and the mode wavelength of the VCSEL. In addition, it is beneficial to reduce the effect of thickness deviation on the shifting of the mode wavelength of VCSELs to put the fused interface a little far away from the active region.更多还原