【摘要】 HgCdTe光伏探测器的钝化介质膜应力常常限制其低温性能,利用高分辨率多重晶X射线衍射仪中的三重晶衍射技术和倒易空间作图对钝化介质膜应力进行了表征,发现在较高溅射能量下沉积的钝化膜,由于应力的作用,HgCdTe晶片出现弯曲,并有大量镶嵌结构,而在较低的溅射能量下和热蒸发下沉积的钝化膜,晶面未出现明显弯曲,可获得较低应力的钝化介质层。更多还原

【Abstract】 The low-temperature performance of HgCdTe photovoltaic detector is limited by the stress of wafer. In this paper, the stress of HgCdTe passivated by CdTe and ZnS was investigated byusing triple crystal x-ray diffraction and reciprocal space mapping, it is found that under the high sputtering power the wafer is bended due to induced stress, and the mosaic structure is observed. Thelow-stress film is achieved by low-power sputtering and thermal evaporation.更多还原