【摘要】 采用MT CVD工艺技术 ,用CH3 CN等含有C/N原子团的有机化合物 ,在 70 0～ 90 0℃沉积组织致密、层间结合强度好、柱状结晶的超级TiCN涂层。研究了沉积温度、压力、不同气体流量等工艺参数对TiCN涂层组织结构及性能的影响规律 ;分析了超级涂层材料设计机理和结构 ,给出了在经过改造的高温化学气相沉积 (HT CVD)设备上应用HT CVD和MT CVD相结合的新的沉积工艺技术生产超级涂层材料的工艺参数以及超级涂层硬质合金刀片性能测试分析结果更多还原

【Abstract】 The compact and columnar crystalline TiCN coating layers with very good bonding strength between a layer and another layer is deposited by using Medium Temperature Chemical Vapor Deposition (MT-CVD) at 700～900℃,where CH 3CN organic composite with C/N atomic clusters etc. is utilized. The effect regularity of coating processing parameters, such as depositing temperature, pressure and different gas flow quantity, on structures and properties of TiCN coating layers are investigated. The design mechanics and structure of the super coating materials are analyzed. The processing parameters of depositing super coating by using a new coating technology combined with the HT-CVD and MT-CVD technology on the improved HT-CVD equipment are gained. The testing results for the properties of carbide inserts with super coating materials are also presented.更多还原