【摘要】 金属光栅编码器可以在恶劣环境条件下有效而稳定地工作。本文介绍了一种新的基于不同反射层反射率差形成莫尔条纹的原理的反射式金属光栅。反射式金属光栅光栅盘基材与光栅盘加工及光栅信号的提取,与传统玻璃光栅盘有很大区别。因此,反射式金属光栅编码器的制作有较高的难度。我们通过采用新的工艺方法来制作金属栅编码器,主要解决了光栅制作、信号提取和光电信号处理这三个关键问题。更多还原

【Abstract】 The metal grating encoder can work availably and stably under difficult conditions. A new reflective metal grating disk based on the theory of Moir’e fringe produced by different reflectivity between different reflective layers is introduced in the paper. Material used for the disk and method for manufacturing the metal grating disk as well as the extraction of grating signal are quite different from the traditional glass grating disk. It is hard to make such metal grating encoder. On the basis of some new technologies and methods proposed to solve three key factors for metal grating disk manufacturing, signal extraction and photoelectric signal processing, a new metal grating encoder has been developed.更多还原