【摘要】 电子探针微区分析(EPMA,XRMA)由于X射线激发深度较大而对薄层分析产生困难,无法准确确定分析结果是样品表面的成分还是样品体相的成分。本工作在通常的X射线微区分析设备上,采用外全反射角X射线能谱微分析方法,通过对硅衬底上不同膜厚的铝膜和铜膜的测定,探索出一种区分膜成分和体相成分的新方法。结果表明:与常规的方法相比,该法有较高的表面灵敏度,可很好地解决薄层分析的困难。更多还原

【Abstract】 The drawback of routine electron probe microanalysis(EPMA) is the uncertainty of the surface composition analysis. To deal with the problem, we developed a new method named External-total reflection angle X-ray microanalysis(ETRAXM) on a conventional SEM/EDS. The thin Al film and thin Cu film on a Si wafer was measured by ETRAXM. The result showed that the new method has higher surface sensitive than routine EPMA.更多还原