【摘要】 采用电子回旋共振微波等离子体化学气相沉积技术(ECR CVD),CH4和H2为气源,分别以Fe3O4,Co纳米粒子及Fe(NO)3溶胶为催化剂在多孔硅基底上制备了碳纳米管;在Si(111)和石英基底上以Fe3O4纳米粒子为催化剂实现了碳纳米管的生长·使用扫描电子显微镜(SEM)、透射电子显微镜(TEM)对样品的形貌、尺寸及结构进行表征·讨论了催化剂和基底对碳纳米管形貌、密度和取向性的影响·结果表明:催化剂影响碳纳米管的成核密度和生长速度,基底通过影响催化剂的特性和分布均匀性,对碳纳米管的形貌和生长模式产生重要影响,以Fe3O4为催化剂在多孔硅上实现了碳纳米管的最优定向生长·更多还原

【Abstract】 Carbon nanotubes （CNTs） were prepared by way of electron cyclotron resonance chemical vapor deposition （ECR-CVD） using CH₄ and H₂ as source gases. During the preparation the Fe₃O₄ nanoparticle, Co nanoparticle and Fe（NO）₃ sol were used as catalysts to prepare CNTs on porous silicon substrates, and the Fe₃O₄ nanoparticle was used singly as catalyst to grow CNTs on Si （111） and quartz substrates. Scanning electron microscopy （SEM）, transmission electron microscopy （TEM） were used to evaluate the morphology and structure of the CNTs prepared. The results showed that the catalyst affects the nucleus density and growth rate and the substrate affects greatly the morphology and growth mode by controlling the properties and distribution uniformity of catalyst. Among the different CNTs, the well-aligned carbon nanotubes are those which are prepared on porous silicon substrate with Fe₃O₄ nanoparticle as catalyst, as revealed in the study.更多还原