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钛表面辉光等离子无氢渗碳的研究
Double-Glow Plasma Surface Carbon Implantation of Non-Hydrogen on Titanium
【摘要】 采用双层辉光离子渗碳技术在本底真空度为 5×10-3Pa 的高真空下,用 99.999%的高纯氩气进行无氢渗碳。在整个工艺过程中,没有涉及到氢元素,实现了无氢渗碳。试样材质为 TA1 工业纯钛,用透射电镜(TEM)观察渗层结构;X 射线衍射(XRD)测定渗层的相组成;用 M200 耐磨试验机测定渗碳试样的耐磨性能;渗碳试样的磨痕表面状态用 TR240型粗糙度仪测定。渗碳层厚度大于 100 μm。表面层生成的是 TiC,基体仍为 α-Ti。近表面渗层维氏硬度为 6 000 MPa,表面的硬度远大于此值。摩擦系数 0.11。纯钛经过无氢渗碳后,与未经过处理的纯钛相比磨损量仅为纯钛试样的1/1 592.5。研究得出:钛材经过双辉等离子无氢渗碳后,不仅提高了表面的硬度,同时降低了摩擦系数,因而使耐磨性能得到了大幅度的提高。
【Abstract】 The process of plasma surface carbon implantation was conducted in vacuum (5×10-3 Pa) with 99.999%Ar2. The carbonization layer was formed on pure titanium by double-glow plasma surface carbon implantation. The fracture morphology, phase composition wearability, and surface hardness of the carbonization layer were determined by SEM, X-ray diffractometry (XRD), M200 friction resistant meter, and TR240 hardometer. The results show that the depth of carbonization layer which is composed of TiC is more than 100 μm, the substrate is α-Ti, the hardness HV nearly to 6 000 MPa. the surface hardness HV is 20 000 MPa, and the friction coefficient is 0.11 after double-glow plasma surface carbon implantation on titanium. The abrasion wear of the carbonization layer is 1 592.5 times as less as that of pure titanium. So by means of double-glow plasma surface carbon implantation the attrition resistant of Ti is greatly improved.
- 【文献出处】 稀有金属材料与工程 ,Rare Metal Materials and Engineering , 编辑部邮箱 ,2004年11期
- 【分类号】TG156.8
- 【被引频次】17
- 【下载频次】272