【摘要】 油田测井用压力传感器在温度、量程和封装等方面有着特殊的要求 ,我们提出了一种新型多晶硅压力传感器 ,其工作温度高 (- 2 0～ 2 2 0°C) ,压力量程宽 (2～ 30MPa) ,具有较高的稳定度 (<4× 10 - 4FS/°C)。文中多晶硅膜的零点温漂TCR和灵敏度温漂TCS特性 ,给出了片内温度补偿的方法。更多还原

【Abstract】 A new type of pressure sensor for oil-well measurement is developed.It operates at broad temperature range(-20～220℃) and broad high pressure range (2～30 MPa) with high stability (<4×10 -4FS/°C) and low cost etc.Special considerations are given to the relationships between the doping concentration of polysilicon films and TCR and TCS respectively. A new temperature compensation method and technology of high temperature pressure sensor are given, the integration of polysilicon temperature sensor on the pressure sensor chip is proposed and fulfilled. This pressure sensor has been successfully applied in the pressure measurement of the oil-well.更多还原