【摘要】 给出了考虑梁的轴向载荷情况下理论计算公式的推导过程 ,在变形较大时两种公式计算结果最大相差9.6 5 % .用 L PCVD技术制作了几种大小不同的 T形梁结构 ,给出了残余张应力与杨氏模量比值 .更多还原

【Abstract】 For the in situ measurement of mechanical properties of films with residual tensile stress,the method of the T shaped structures is developed.When δ ,center deflection of the fixed end beam,is less than 30% of h ,beam thickness,the center deflection can be found by the theory of small deflection and the axial load of the fixed end beam may be neglected.When δ is larger than 30% of h ,the axial load of the fixed end beam must be considered,and the previously formula is not suitable for this case.The detailed theoretical deduction of the formula for the latter case is contained in this paper.The maximum discrepancy of the two calculated results by the two different formulae is 9 65% and several different T shaped structures are fabricated by LPCVD and their ratios of the residual stress to Young’s modulus are given.更多还原