【摘要】 采用低压金属有机化合物气相外延 (L P- MOCVD) ,制备了顶端发射氧化物限制、内腔接触结构 980 nm的垂直腔面发射激光器 .应用了选择氧化和自对准工艺来实现电流限制 .在 2 8m A脉冲电流驱动下 ,器件的输出功率为10 .1m W,斜率效率为 0 .4 6 2 m W/ m A.脉冲工作下 ,最高输出功率为 13.1m W.室温连续工作下 ,输出功率为7.1m W,发射波长为 974 nm ,光谱半宽为 0 .6 nm.研究了氧化孔径对阈值电流和微分电阻的影响 ,结果表明较小的氧化孔径可以获得低的阈值电流 .更多还原

【Abstract】 Top-emitting oxide-confined intra-cavity contact structure 980nm VCSEL is fabricated by low-pressure metal organic chemical-vapor deposition (LP-MOCVD).Self-aligning etching process and selective oxidation are applied for current confinement.Output light power of 10.1mW and slope efficiency of 0.462mW/mA are obtained under room temperature,pulse operation,and injection current of 28mA.The maximum light power is 13.1mW under pulse operation.Output light power of 7.1mW,lasing wavelength of 974nm,and FWHM of 0.6nm are obtained under CW condition.The study of oxide-aperture influence on threshold current and differential resistance shows that lower threshold current can be obtained with a smaller oxide-aperture diameter.更多还原