【摘要】 对静电驱动一维MEMS微镜中的静电弹性耦合问题进行了研究,分析了电极板的偏转变形与静电力的相互影响。为低品质因数的一维微镜系统建立了动态和静态模型,动态模型为一维扩散方程,静态模型由二阶微分方程表示。利用建立的模型对静电弹性耦合一维微镜系统的稳态特性进行分析,得出结论:静电力与弹性力的相对强度λ有一个临界值,当λ处于临界值以上时,系统将没有稳态解,设计的微镜结构应当保证λ处于临界值以下。更多还原

【Abstract】 The coupling of electrostatic-elastic in the micro mirror system with one degree of free is discussed. The interrelationship between the deflected deformation and the electrostatic force of the plates is analyzed. The mathematical models of electrostatic-elastic for low quality factor 1D MEMS micro mirror systems are established. The dynamic model is one order diffusion equation and the static model is two orders differential equation. For the steady-state of 1D micro mirror system,the result is that a critical value exists for the strength λ of electrostatic-elastic. If λ is beyond the critical,the micro mirror system will not be steady. Designing the micro mirror system,λ should be less than the critical value.更多还原