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利用面阵CCD测量小角度的研究
Measurement of Two-dimensional Small Angle by Means of Matrix CCD
【摘要】 分析了采用面阵CCD器件和自准直原理实现二维小角度测量的原理和方法,设计了采用计算机控制的高速数据采集和处理软件,通过使用Visual C++语言实现的界面,可以实时显示测量数据。实验表明,该面阵CCD双坐标自准直仪量程为±3’,分辨率优于0.1”,测量误差优于0.7”。
【Abstract】 A method for measuring two-dimensional small angle by means of the matrixCCD and the principle of auto-collimation is presented and analysed, and its software controlledby computer is designed in order to realize high-speed data capturing and processing, and theinterface displays the measured data in real-time through Visual C++. The experiment resultsshow that the measuring error of this instrument is better than 0. 7 arc second within 3 arc minuterange, with a measuring resolution better than 0.1 arc second.
【关键词】 面阵CCD;
二维小角度测量;
自准直仪;
【Key words】 matrix CCD; two-dimensional small angular measurement; auto-collimator;
【Key words】 matrix CCD; two-dimensional small angular measurement; auto-collimator;
【基金】 哈尔滨工业大学校基金(HIT.MD.2001.18).
- 【文献出处】 半导体光电 ,Semiconductor Optoelectronics , 编辑部邮箱 ,2004年02期
- 【分类号】TN386.5
- 【被引频次】34
- 【下载频次】528