【摘要】 压电陶瓷执行器在较高电场的作用下将产生严重的非线性、迟滞和蠕变 ,从而大大降低了它的定位精度。从控制方式、驱动方式和控制算法上 ,分析、总结了国内外关于纳米定位中压电陶瓷执行器的各种控制方法 ,进而提出 :压电陶瓷执行器在静态或对频响要求不高的场合下 ,应采用电压驱动、电容传感器反馈并同优良控制算法相结合的控制方法 ;而在对频响要求较高的场合下 ,应采用电荷驱动、电容传感器反馈并同优良控制算法相结合的控制方法更多还原

【Abstract】 Piezoelectric micropositioner controlled by high electric field shows serious nonlinear characteristics such as hysteresis and creep, which degrades the positioning accuracy greatly. Current methods for nano-positioning process were summarized, including control methods, driving methods and control algorithms. Better solutions were given. In static or unnecessary fast frequency response circumstance, the method should be as that the piezoceramic actuator is driven by voltage, feed back actual position by capacitance sensor, and control with good algorithms. In the circumstance requiring fast frequency response, the method should be as that the piezoceramic actuator is driven by charge, feed back actual position by capacitance sensor, and control with fine algorithms.更多还原