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一种栅纹图像间距精密测量方法
A PRECISION MEASUREMENT TECHNOLOGY OF SPACE BETWEEN RASTERS
【摘要】 介绍一种栅纹栅距的精密图像测量方法。以标准栅纹作为基准,对栅纹的小旋转变化进行放大,利用图像测量技术完成对栅纹栅距的精密测量。
【Abstract】 A measurement method of a precision image for space between rasters based on image analysis is introduced. In the technology, firstly, the error caused by small angle rotation of the raster is zoomed out using the standard raster, and then image measure technology is employed to get the precision space between rasers.
- 【文献出处】 应用光学 ,Journal of Applied Optics , 编辑部邮箱 ,2003年01期
- 【分类号】TP274.4
- 【下载频次】39