【摘要】 聚合酶链式反应 (PCR)在生命科学研究及诸多相关领域已经得到了广泛应用。PCR生物芯片是利用微加工技术制作的能够实现PCR扩增反应的微装置。文中给出了基于MEMS技术的PCR生物芯片的微加工技术及加工方法 ,特别对集成在芯片上的加热器及温度传感器的微加工方法进行了重点介绍 ,并对它们的特性进行了分析比较。最后预测了PCR生物芯片微加工技术的发展方向及要克服的主要难题更多还原

【Abstract】 Polymerase chain reaction(PCR) has been widely applied in life science and other related fields.PCR biochip is a kind of micro device made by microfabrication technology which can carry out PCR reaction.A brief introduction about microfabrication of PCR biochip based on MEMS techniques is given.Special attention is paid to the microfabrication of heater and temperature sensor.We also compare their characteristic.Finally,the trend of the microfabrication technique and difficulty to be resolved in the microfabrication process of PCR biochip are predicted.更多还原