【摘要】 用射频反应溅射法在Si(111)衬底上制备了C轴取向的多晶ZnO薄膜 ,通过不同温度的退火处理 ,研究了退火对多晶ZnO薄膜结构和发光特性的影响 .由x射线衍射得知 ,随退火温度的升高 ,晶粒逐渐变大 ,薄膜中压应力由大变小至出现张应力 .光致发光测量发现 ,样品在 4 30nm附近有一光致发光峰 ,峰的强度随退火温度升高而减弱 ,联合样品电阻率随退火温度升高而逐渐变大的测量及能级图 ,推测出ZnO薄膜中的蓝光发射主要来源于锌填隙原子缺陷能级与价带顶能级间的跃迁更多还原

【Abstract】 Highly oriented polycrystalline ZnO films have been prepared by rf actively sputtering technique. We have investigated the structural and optical properties of ZnO films. x ray diffraction was employed to analyze the influence of the post treatment on the properties of ZnO thin films. The grain size increases with annealing temperature. The shift of the diffraction peak position from its normal powder value was observed. The photoluminescence (PL) spectra of these samples consist of one emission peak centred at 2.9eV.The intensities of PL peaks decrease with increasing annealing temperature. We propose that the emission comes from the interstitial Zn.更多还原