【摘要】 应用基于表面硅、体硅微电子工艺的混合微加工技术研制了新型扭转微镜光学致动器 ,实现了致动器结构与具有光纤自固定、自对准功能的新型光纤定位保持结构的单片集成。新型扭转微镜光学致动器的机电和光学特性研究表明 ,其工作寿命超过 10 8次动作 ,最小动作时间估计可低于2ms ,存在驱动微镜自然地翻转 90°角的静电阈值电压和维持微镜处于已翻转 90°角状态的静电最低保持电压 ;其微镜的表面粗糙度及其分布基本满足光的波分复用技术等的应用要求。新型扭转微镜光学致动器可在光纤网络中作为光开关或可变光衰减器使用。设计、制作及研究了由新型扭转微镜光学致动器组成的 2× 2光开关阵列更多还原

【Abstract】 Novel torsion mirror actuators with monolithically integrated new fiber holding structures, which can feature self fixing and self aligning of optical fibers, are fabricated using the mixed micromachining based on the surface and bulk silicon microelectronics, and their electromechanical and optical characteristics are investigated experimentally and theoretically. The lifetime and the estimated shortest actuating time of the torsion mirror actuators can reach 10 8 at least and less than 2ms, respectively. There certainly exist the electrostatic yielding voltages for driving the micro mirrors of the actuators to tilt from 0° to 90° spontaneously, and the minimum holding voltages for keeping the tilting angle of the mirrors to be in 90° as well. The values and distribution of the surface roughness of the micro mirrors are acceptable for wavelength division multiplexing applications basically. In general, the novel torsion mirror actuators can be applied as optical switches or variable optical attenuators for optical networking. A kind of 2×2 optical switch array composed of four novel torsion mirror actuators is designed, produced and studied.更多还原