【摘要】 在制造微电子机械系统(MEMS)的器件的过程中,通常要进行高温的薄膜淀积或生长,因此薄膜中存在的残余应力很多情况下影响着器件结构的特性,有时甚至严重劣化器件的性能。本文以实例具体分析了薄膜残余应力的影响,并介绍了残余应力的起源、产生机制以及控制。更多还原

【Abstract】 In the course of fabricating MEMS devices,it always required the growing or deposi-tion of the thin films at high temperature.So the residual stresses in thin films can affect the device properties.Sometimes the properties degrade severely.Some examples are given to show the influence of the residual stresses.And the investigation of the residual stress origin,generat-ed mechanism and how to control are shown.更多还原