【摘要】 真空混合漏孔 ,如漏孔通道内含有空腔、毛细管道等 ,示漏气体除存在超长反应时间外 ,还存在超长的延迟时间和保持时间。只有经该延迟时间后 ,检漏仪才能探得信号。为满足真空元件在生产中的快速检漏的要求 ,又避免常规质谱检漏法漏检混合漏孔的可能性 ,在真空室内对检漏元件集体充氦 ,然后在保持期内逐个检测氦气浓度来判断有无混合漏孔 ;也可用质谱计比较残余气质谱图中空气成分来确定更多还原

【Abstract】 Various techniques were developed to achieve the goal of fast leak detection of large quantity of vacuum components and of eliminating the failure of mixing leak detection with the conventional leak detection technique.The technical difficulty is that it takes a very long time for the leak detector to identify the response of the detectable gas entering the vacuum through the mixing leak consisting of small defect holes and capillaries in the vacuum components because of the long holding time and delays.The cure we suggest is that a large number of vacuum components are first installed in a vacuum chamber which is later pumped to low pressure,next,the chamber is filled with helium,and finally,individual vacuum component is leak detected one by one during its "holding time" by helium concentration detection.Alternatively,we may detect leaks by means of the variations in air peaks in the spectra of the residual gas with a quadrupole mass spectrometer.更多还原