【摘要】 采用扫描电镜、Ｘ射线衍射及喇曼光谱等手段研究了ＨＦＣＶＤ过程中热丝碳化对金刚石成核特性的影响。热丝经充分碳化后能发射出更多热电子，进而从反应气体中激发出更多原子Ｈ和ＣＨ３＋，使金刚石晶核的孕育期大为缩短，３ｍｉｎ内即可在未经表面预处理的Ｓｉ衬底上获得１０１０ｃｍ－２以上的高晶核密度。更多还原

【Abstract】 The mechanism of diamond nucleation enhancement by filament carburization in the hot filament chemical vapor deposition (HFCVD) process was investigated by scanning electron microscopy (SEM), X-ray diffraction (XRD) and Raman spectroscopy. The deeply carburized filament can emit far more hot electrons, which is essential to enhance its decomposition efficiency to the reaction gas mixtures. As a result, the duration of diamond nuclei incubation can be significantly shortened, and the nuclei density of diamond as high as 1010cm-2 can be easily achieved within 3min.更多还原