【摘要】 综述了多晶体薄膜材料织构的诱导和控制方法、影响薄膜结晶过程中晶体取向的因素及不同生长条件下形成晶体择优取向的原因。讨论了目前多晶体薄膜织构控制研究中存在的问题和发展方向。更多还原

【Abstract】 Latest results of research on the methods of texture induction and control during crystal growthof polycrystalline thin films are reviewed.The mechanisms responsible for the formation of preferred orientation and the effects of preparation techniques on the crystalline orientation are analyzed.Moreover,some problems and trends are exaimed in the current research on the texture induction and control during crystal growth of polycrystalline thin films.更多还原