【摘要】 在高频直流脉冲放电的条件下 ,对低气压放电过程中存在的弧光放电的发展过程进行了研究 ,揭示了脉冲放电频率的提高对抑制弧光放电的发展是有效的 ,而快速的弧光放电检测和保护电路是不可缺少的 .为一种新型等离子体高频激励电源的研制提供了有效的依据更多还原

【Abstract】 The development of arc\|discharge was studied under the condition of high frequency pulse discharge. The result is obtained that the capability to restrain arc\|discharge becomes better while pulse frequency of the power supply raise ,and that fast arc\|discharge detecting and circuit protecting is needed. Some valid bases are given for the design of high frequency plasma pulse power supply.更多还原