【摘要】 针对目前的离子注入实验都是在真空状态下进行的事实 ,设计了真空内置式大气靶室装置。采用Monte Carlo方法模拟计算了注入离子进入靶室的穿透能量和行迹方向 ,证明真空内置式靶室技术是可行的 ,并用实验验证了注入效果。更多还原

【Abstract】 An air chamber placed in vacuum for ion implanting was designed aiming at the fact that the ion implantation experiments are all performed under the vacuum state. Monte Carlo method was used to simulate the penetrated ion energy and path to conform the feasibility. The results showed the design is successful.更多还原