【摘要】 用溶胶 凝胶法在非晶玻璃上制备VO2 薄膜 ,经过熔融、涂膜、烘干和热处理等工艺最后得到电阻相变 2～ 3个量级的VO2 薄膜。对烘干温度、熔融温度、膜厚和热处理温度对薄膜电阻开关特性的影响进行了研究。通过AFM ,XRD和XPS对薄膜的结构和特性进行分析。更多还原

【Abstract】 High quality vanadium dioxide thin films were grown on glass substrates by Sol-Gel processes.The films exhibit 2～3 order of magnitude abrupt variations of resistivity in a temperature range of around 60～80 ℃.The films were studied with atomic force microscopy.X-ray diffraction and X-ray photoelectron spectroscopy.The four procedures of the processes,including quenching,coating,drying and vacuum annealing,were also studied to understand their specific influence on the resistive switching characteristics of the films.更多还原