【摘要】 介绍了以GH0 7X热阴极电离超高真空计为核心的双重真空保护模块的设计和应用。实验结果表明 ,GH0 7X对真空系统压力突变的快速报警响应时间可小于 2 0 0 μs,慢速报警响应时间小于 10 0ms。实验数据还表明 ,快速报警响应时间与气体分子浓度和真空计规管灯丝的发射电流密切相关。分析比较了溅射离子泵、冷阴极电离超高真空计、热阴极电离超高真空计等作为真空保护传感器的不同电子学设计。与国内外报道的其它光束线真空保护模块设计相比 ,GH0 7X真空计独有的双重真空保护模块设计 ,使得光束线真空保护控制系统响应更快、更可靠。更多还原

【Abstract】 A novel fast vacuum protection sensor module has been successfully developed,which makes use of the hot-cathode ultra high vacuum (UHV) ionization gauge controller,GH07H.In simulation tests,the response time of the controller was found to be less than 200 μs when ambient air leaked into the vacuum system through a hole of 0.8 mm in diameter.The results show that the alarm time depends strongly on both the gas concentration and the emission current of the ionization gauge.The electronic circuitry of the various vacuum protection schemes,which use sputtering ion pump or cold-cathode or hot cathode ionization gauge as sensors,was compared.The dual vacuum protection module of the GH07X gauge controller provides faster alarm time and more reliable protection for the beam-line vacuum control and protection system than those reported both in China and abroad.更多还原