【摘要】 利用反应磁控溅射方法制备了Fe N薄膜。发现未退火的薄膜基本处于非晶或微晶状态 ,退火或在沉积时对基片施加一磁场 ,可使晶粒变大 ,并出现对应内部存在应力的γ′ Fe4N的 (110 )晶面的择优取向。特别是外加的磁场使得Fe N薄膜具有明显改善的磁性能。作者利用磁场中带电粒子受约运动的观点解释了这一现象更多还原

【Abstract】 Fe N thin films,grown by RF magnetron sputtering in an Ar/N 2 gas mixture,was studied.The results show that before annealing,the film has amorphous or micro crystalline structures.If the film was annealed in vaccum at 140 ℃ 100 min or if a magnetic field perpendicular to the surfaces of the film is applied,the grain sizes can increase and a preferential orientation of the grains,(110)direction of γ′ Fe 4N,can be observed.In addition,the magnetic field improves the magnetic properties of the films;and its possible mechanism responsible was tentatively discussed.更多还原