【摘要】 光学元件受到污染后其光学性能会变差 ,如何对其进行清洗 ,尽可能地恢复其原来的性能 ,使其能够重新使用显得很重要。本文介绍一种碳污染的原位清洗方法———射频弧光放电法 ,利用原子氧与光学元件表面所沉积的碳反应以达到清洗的目的。清洗装置建立后对北京同步辐射装置 (BSRF)上所使用的光学元件进行了清洗 ,取得了较好的效果。更多还原

【Abstract】 Removal of contaminats from optical components is important because contamination often causes serious deterioration of performance of optics devices.An in situ oxygen glow discharge cleaning has been developed and used to clean optical devices installed in the soft X ray beam lines of Beijing Synchrotron Radiation facility with satisfactory results.This cleaning technique is simple and effective,especially to remove carbon contamination.更多还原