【摘要】 本文介绍了一种新颖的基于单片机的硅微机械谐振传感器测量方法及其实现。在微传感器工作原理理论分析的基础上 ,证明其适合于真空环境测量。利用闭环测控电路方式 ,使整机具有良好的灵敏度和可靠性。讨论了测量仪的测量原理、硬件组成和软件设计。该测量仪的真空度测量范围接近 10 2 ～ 10 - 1 Pa,具有可靠性高、响应速度快等优点更多还原

【Abstract】 This paper presents a novel measurement method and system for the silicon micromechnical resonator based on the singlechip microcomputer system.Based on the theoretical analyses of the operation principle of the microsensor,it has been demonstrated that the sensor is suited for the vacuum measurement.By using the cir- cuit type of closed- loop measurementand control,the system possesses high sensitivity and reliability.The mea- surement principles,hardware composition and software design have been discussed.The vacuum measuring range of this system is near10 2～ 10 - 1 Pa,and it has the advantages of high reliability and fast response speed.更多还原