【摘要】 在分析体声波滤波器的原理、结构及相关参数的基础上 ,结合锆钛酸铅薄膜的材料特性 ,提出了一种射频体声波滤波器设计。设计中考虑了衬底、电极的质量加载对中心频点的影响 ,模拟了不同连接方法下滤波器的频率特性 ,探讨了薄膜材料的制备、退火、刻蚀工艺的选择与优化更多还原

【Abstract】 RF bulk acoustic wave resonators and filters, using PZT thin films and MEMS technology, are designed in this paper.The effects of the mass load of substrate and electrodes are estimated.The frequency characteristics of varied filters are simulated.The PZT preparation,annealing and etching processes are also discussed.更多还原