【摘要】 微电子机械系统技术的迅速崛起 ,推动了微型材料拉伸测试方法的发展。文中列举几种典型的微型材料拉伸实验方法 ,具体说明其驱动方式、力和位移测试原理 ,并介绍实验中的难点 ,如试样加工、夹持和对中等方法。并进一步分析能满足未来发展需求的拉伸测试原理更多还原

【Abstract】 The rapid developments of micro electro mechanical systems (MEMS) make progress in the research on the tension measurements of minisize materials. The paper is specially focused on introducing several typical tension ways, and cited in illustration of the tension measuring principles for drive, load and displacement and the difficulties of sample handling, alignment and gripping. Finally, a discussion of the future on tension measuring principle is given.更多还原