【摘要】 综述了等离子体基高温离子注入的发展及应用情况 ,介绍了由于高温注入中辐照增强扩散和热扩散的共同作用 ,注入层成分、组织结构、力学性能和抗腐蚀性能随温度提高发生的变化。并对今后的发展趋势作了预测。更多还原

【Abstract】 The developments and applications of plasma based ion implantation (PBII) at elevated temperature are reviewed. Because of radiation and thermal enhancement to diffusion, the composition, structure, mechanical and corrosion properties of the implanted layer change dramatically with increasing temperature. Regularities obtained by far are summarized. And further research efforts are also briefly prospected.更多还原