【摘要】 通过X射线光电子能谱 (XPS)和小掠射角X射线衍射 (GXRD)分析测定了铝合金LY12等离子体基离子注入氮再注入钛的改性层成分分布及相组成。测量了纳米硬度 ,进行了摩擦磨损试验及磨痕形貌观察。讨论了磁控靶溅射电流 40mA、40 0mA对改性层结构和摩擦学性能的影响。结果表明 ,氮在注入层呈高斯分布 ,钛沿注入方向逐渐减少 ,钛的注入使氮的分布展宽 ,在 40 0mA下注钛有钛的沉积层出现。和LY12相比 ,摩擦学性能显著提高 ,粘着磨损程度显著减轻 ,40 0mA下改善幅度更大 ,形成TiO2 、TiN、TiAl3、Al2 O3、AlN或Ti相是主要原因更多还原

【Abstract】 The modified layer of aluminum alloy LY12 implanted with N/Ti by Plasma Based Ion Implantation (PBII) was characterized by X\|ray Photoelectron Spectroscopy (XPS) and Glancing Angle X\|ray Diffraction (GXRD). The nano\|hardness was measured with Nano Indenter TM II. The wear test was carried out on the ball\|on\|disk tester. The characterization of the wear track was observed by scanning electron microscopy (SEM). What is more, the influences of the sputtering current for unbalanced magnetron cathode target 40mA, 400mA on the structure and the tribological properties have been discussed. The results show that the depth profile of content of N in the implanted layer is like Gaussian\|distribution, and that of Ti is decreasing gradually along the implanted direction. The process of implanting titanium makes the profile of N broaden. Implanting with titanium at 400 mA can be formed a titanium deposited layer besides a titanium implanted layer. Compared with LY12, the tribological properties have been remarkably improved, and the adhesive wear has been greatly lightened with the better effect at 400 mA, It is due mainly to the presence of TiO\-2、TiN、TiAl\-3、Al\-2O\-3、AlN or Ti phase in the modified layer.更多还原