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准分子激光器平顶高斯激光束的产生
Generation of Flattened Gaussian Beams for Exaimer Laser
【摘要】 在 Xe Cl准分子激光器中 ,采用定向棱镜作为端反射镜与平面输出镜构成激光器共振腔 ,获得了平顶高斯激光束输出 ,并具有腔镜高抗失调能力 ,改善了激光束质量。
【Abstract】 A flattened Gaussian beam was obtained in the XeCl excimer lasers with a directional prism cavity, the beam quality was improved, and the ability of anti-disalignment of excimer lasers was increased.
【关键词】 平顶高斯光束;
定向棱镜腔;
准分子激光器;
【Key words】 flattened Gaussian beams; directional prism cavity; excimer laser;
【Key words】 flattened Gaussian beams; directional prism cavity; excimer laser;
- 【文献出处】 激光与光电子学进展 ,Laser & Optronics Progress , 编辑部邮箱 ,2001年10期
- 【分类号】TN248
- 【被引频次】10
- 【下载频次】180