【摘要】 介绍了剪切干涉仪适时定量处理的方法。通过互相垂直两个方向的剪切图形 ,解算出镜面的实际形状。提出两种处理方法 :即变换系数法和扩展了的联立方程求解法。然后介绍了在采样和处理过程中的技巧 ,最后对剪切干涉棱镜的发展和如何将移相干涉技术应用到剪切干涉中的可能性 ,做了初步的探讨。更多还原

【Abstract】 The quantitative process of shearing interference are introduced.Through two shearing interferograms whose shearing directions are normal to each other,the real error condition of tested wavefront can be calculated.The calculation can use two different ways,that is:Transposition Zernike Coefficients Method and Extended Simultaneous Equations Method.At last showing 2 types shearing prisms. We can use it to get two shearing interferograms at the smae time and to change the shearing distance arbitrarily.On the other hand,if we move the prism group with 45°direction in X-Y plane,we can realize the shearing fringes scanning through the both X and Y shearing interferogram,at the same time in X and Y shearing direction,separately.In this way,the phase shift also can be used in shearing interference.更多还原