【摘要】 介绍了由浙江大学研制的CQG II型车间数字干涉仪检测 φ3 6mm× 0 5mm平行平面玻璃的透过波面畸变的情况。最近研制出的干涉仪测量的最大口径为 φ60mm ,采用移相式条纹扫描数字化处理 ,基于WINDOWS操作系统实现实时检测 ,以优于λ/ 30的精度计算出被检件的波面误差。工厂生产检测表明 :在上述仪器上增加一个 4倍口径的放大系统 ,可以使通光口径 φ3 1mm的工件达到 42 0 0个采样点 ,仪器的透射测量标准干涉腔误差PV≤ 0 0 2 8λ ,仪器隔日多次测量重复性PV≤ 0 0 3λ。该仪器已经正常投入使用 ,生产的用于光学信息产品的微型光学件已为日本先锋公司 (PIONEER)复检通过 ,成为工厂批量生产过程质量控制 (QC)的重要手段。更多还原

【Abstract】 This paper describes the testing of transmitted wavefront distortion for φ3.6mm×0.5mm glass parallel flat using the CQG-Ⅱ shop digital interferometer manufactured by Zhejiang University. The recently developed interferometer, which employs the phase-shifting fringe scanning digital analysis with its software running in WINDOWS operating system, can measure the optics with maximum aperture of φ60mm and gives its wavefront distortion with accuracy of λ/30. Practical Shop Testing demonstrates that the sampled points within the clear aperture of φ3.1mm could reaches 4200 when a four times optical enlarge system is inserted in our interferometer. Since the system error of interference cavity PV≤0.028λ for transmitted testing, the interferometer has the good measure repeatability of PV≤0.03λ during several days. The interferometer has been available for daily use and the micro-optics whose quality is ensured by our interferometer has been accepted by the PIONEER company in Japan.更多还原