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薄膜厚度测控技术中的物理原理
THE PHYSICS PRINCIPLES ON MEASURING AND CONTROLLING THIN FILM THICKNESS
【摘要】 针对当前应用较为广泛的各种薄膜厚度测控技术,简明介绍了光电极值法、干 涉法、石英晶体振荡法及椭偏仪法的物理原理及其应用.
【Abstract】 In accordance with many measurement and controlling technologies of thin film thickness which are widespreadly used today, four physics principles and their uses including photoelectic maximum method, interferential method, quartz crystal oscillating method and ellipsometry are introduced simply.
【关键词】 膜厚测控;
极值法;
干涉法;
石英晶体振荡法;
椭偏仪法;
【Key words】 measuring and controlling thin film thickness; maximum method; interferential method; quartz crystal oscillating method; ellipsometry;
【Key words】 measuring and controlling thin film thickness; maximum method; interferential method; quartz crystal oscillating method; ellipsometry;
- 【文献出处】 物理与工程 , 编辑部邮箱 ,2001年02期
- 【分类号】O484
- 【被引频次】19
- 【下载频次】403