【摘要】 从超声波清洗用清洗溶剂，特别是替代消耗臭氧层物质的氯化氟代碳（CFC）清洗溶剂等方面介绍了集成电路的清洗技术；还介绍了集成电路的免清洗工艺技术, 使用免清洗工艺技术对各道关键工序的控制及采用免清洗技术的主要优势。更多还原

【Abstract】 Cleaning agents used for ultrasonic cleaning technology, especially the substitutes for CFC are introduced. Non-cleaning technology is also discussed, including its important procedures, applications and advantages更多还原