【摘要】 为了降低大直径 ＣＺＳｉ单晶生长过程中氧的引入，采用不同的热场，通过最优化方法，得到了适于大直径（１５４ｍｍ）晶体生长的热场温度分布，使熔体的纵向温度梯度下降，热对流减小，硅单晶中氧含量降低更多还原

【Abstract】 In order to reduce introduced oxygen in large-diameter CZSi single crystal, a different heat zone in 40.6cm system adopted in this paper. The better distribution of temperature in heat zone for 154mm crystal by optimum method was obtained. Axial temperature gradient decreased due to the decrease of thermal convection in the melt. The concentration of oxygen also reduced.更多还原