【摘要】 在射频激励CO2 波导激光器的研制中 ,关键技术是如何使射频电源的能量能最大限度地输入到激光放电区中以及在放电区均匀放电。本文在理论上详细论述了如何在激光头的射频电极上并联上一些电感 ,并在激光头和电源之间加一可调匹配网络以达到这一目的 ,并在实验上实现了矩形波导以及 1× 3和 2× 3波导列阵大面积的均匀放电 ,得到了激光输出更多还原

【Abstract】 Research efforts in developing CO 2 waveguide laser have been centered on two key problems:one is how to input RF energy into the discharge area with maximum efficiency;the other is how to ensure a uniform discharge.A discharge model of the laser head was deve loped to theoretically analyze the discharge mechanism.We found that these two problems can be solved by parallel connecting some inductors to the laser head and by adjusting the impedance of the matching circuit between the laser head and the RF source.With these techinques,uniform discharge in rectangular waveguides,1×3,and 2×3 arrays waveguides has been successfully achieved.更多还原