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PCVD法渗6.5%Si的动力学问题研究

Study on Dynamics of Silicon Infusion by PCVD Technique

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【作者】 王蕾周树青吴新杰李平生高莹陈大凯

【Author】 WANG Lei, ZHOU Shu-qing, WU Xin-jie, LI Ping-sheng, GAO Yin, CHEN Da-kai (College of Materials and Metallurgy, Wuhan University of Science and Technology,Wuhan 430081,China)

【机构】 武汉科技大学材料与冶金学院!湖北武汉4300814300

【摘要】 提高硅钢片磁性能的最佳途径是提高钢片的硅含量。本研究采用等离子体化学气相沉积 ( PCVD)法 ,在( 0 .1~ 0 .3) mm厚的普通硅钢片表面上涂硅 ,然后进行短时间高温扩散处理。结果表明 :硅钢片的 Si含量可达到 6.5% ,磁性能有很大改善。在 ( 460~ 60 0 )℃范围内渗硅 ,其它条件不变 ,渗硅速度随着温度的升高而降低 ,这是由等离子体反应的特殊动力学和热力学性质所决定。

【Abstract】 The best way to improve the magnetic properties of silicon steel sheets is to increase the content of Si in silicon steel. In this study, the surface of a plain silicon steel sheet of (0.1~0.3)mm thickness was coated with silicon by PCVD technique,and then was treated at a high temperature for a short time. The results show that the steel is infused with a high level of silicon(6.5%).The magnetic properties are significantly improved.It is discovered that the silicon coating speed decreases with the rising temperature at the range of (460~600)℃ while other conditions remain constant. This is decided by special dynamics and thermodynamics of plasma reaction.

【关键词】 渗硅PCVD法动力学磁性能
【Key words】 silicon coatingPCVD techniquedynamicsmagnetic propertie
  • 【文献出处】 武汉科技大学学报(自然科学版) ,Journal of Wuhan Yejin University of Science and Technology , 编辑部邮箱 ,2000年04期
  • 【分类号】TG15
  • 【被引频次】7
  • 【下载频次】103
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