【摘要】 文中从理论和实验分析了热处理条件对溅射法制得的InSb薄膜特性的影响。热处理温度、时间和升降温速率都对薄膜特性有影响 ,通过实验得出了最佳的热处理温度、恒温时间和升降温速率。最后讨论了热处理过程中所采用的 3种保护膜更多还原

【Abstract】 Annealing effect of sputtered InSb thin films is described in the paper .InSb thin films properties are affected by thermostatic temperature,time and the rate of heating-up and cooling.By experiments the best temperature,time and the rate of heating-up and cooling are given.At last 3 protecting films on the InSb used in annealing are discussed.更多还原