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Fe/Y非晶多层膜的晶化反应及相演化研究
Study on Phase Evolution and Crystallizing Reaction of Fe/Y Multilayer with an Amorphous Microstructure
【摘要】 由Miedema半经验公式计算的Fe/Y二元系自由能图 ,及退火时Fe/Y非晶多层膜晶化过程的XRD分析结果得出 :Fe、Y晶态自由能低于初始非晶态为晶化提供驱动力 ,形核势垒及临界晶核尺寸控制晶化反应的相选择
【Abstract】 The free energy diagram of Fe/Y system was calculated by means of Miedema’s semi\|empirical theory.Crystallization of the multilayer with an amorphous microstructure was investigated by XRD after annealing.The free energies of crystalline Fe and Y phase are smaller than those of amorphous ones,which supply the thermodynamic driving force for the crystalization.Phase evolution of the multilayer is controlled by free energy barrier and radius of critical nucleus in Fe/Y system.
【关键词】 多层膜;
晶化;
相变;
热力学;
【Key words】 multilayer; crystallization; thermodynamics of phase transformation;
【Key words】 multilayer; crystallization; thermodynamics of phase transformation;
【基金】 山东省自然科学基金资助! (Q96F04145)
- 【文献出处】 金属热处理学报 ,TRANSACTIONS OF METAL HEAT TREATMENT , 编辑部邮箱 ,2000年03期
- 【分类号】TG15
- 【下载频次】40