【摘要】 采用流体模型对圆筒内表面PIII过程进行了二维数值模拟 ,研究了筒内鞘层扩展和交叉重叠对内表面注入的注入能量和注入剂量的影响 .通过模拟发现 ,内表面注入过程存在注入能量和注入剂量偏低的问题 ,但前者并不十分严重 ,而后者则比较严重 .在鞘层发生交叉重叠后筒内出现的高能离子流对注入能量和注入剂量偏低的问题有改善作用更多还原

【Abstract】 Inner surface strengthening of deliberate parts has been a difficult task in the field of surface modification. Plasma immersion ion implantation (PIII), unrestricted by sight light process, is considered a suitable way for deliberate inner surface strengthening. Inner surface PIII process was simulated using two dimensional fluid model, and the influence of sheath expansion and overlapping in the bore on impact energy and retained dose of inner surface was investigated. Lower impact energy and retained dose were found in inner surface PIII, but the former was not very serious, while the latter was. The ion flux with high energy appeared after sheath overlapping in the bore made impact energy and retained dose better.更多还原